Vacuum In-situ Process for Semiconductor Materials and Devices.
نویسندگان
چکیده
منابع مشابه
In-situ Process Control for Semiconductor Manufacturing
There is a critical need for exact, real-time reaction control of the chemical vapor deposition (CVD) systems that are used for semiconductor device manufacture [1]. At present, the development of real-time control for reactions within production-style reactor configurations is hampered by a number of issues: The nature, concentrations and physical distributions of the chemical species within t...
متن کاملPhotonic Materials and Devices
Our recent advances in solid-state optoelectronic materials and devices will be reviewed. In the area of glass optics, fabrication of novel microstructured and multi-core fibers and their use in realizing single mode lasers will be summarized. In organic and plastic optics, photorefractive polymers for 3D display applications and nonlinear optical polymers for high speed modulators in RF photon...
متن کاملSynthesis and physicochemical properties of CuMn2O4 nanoparticles; a potential semiconductor for photoelectric devices
CuMn2O4 nanoparticles, a semiconducting materials with tunable functionalities in solid oxide fuel cell, was successfully synthesized via a sol-gel method using its respective metal cations sources i.e. Cu2+ and Mn2+ in an appropriate complexing agent.The vibrational frequencies below 1000 cm-1 of the obtained materials confirmed the formation of metal-oxygen (M-O:Cu-O, Mn-O) bond in the sample...
متن کاملSynthesis and physicochemical properties of CuMn2O4 nanoparticles; a potential semiconductor for photoelectric devices
CuMn2O4 nanoparticles, a semiconducting materials with tunable functionalities in solid oxide fuel cell, was successfully synthesized via a sol-gel method using its respective metal cations sources i.e. Cu2+ and Mn2+ in an appropriate complexing agent.The vibrational frequencies below 1000 cm-1 of the obtained materials confirmed the formation of metal-oxygen (M-O:Cu-O, Mn-O) bond in the sample...
متن کاملThree - dimensional Process Simulation for Advanced Silicon Semiconductor Devices
The fabrication of advanced semiconductor dev·ices makes heavy demands on the simulation. The main directions for ongoing research are on the one hand the extension of the simulation tools to three spatial dimensions and on the other hand the development of more sophisticated physical models.
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: SHINKU
سال: 1992
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.35.879